- Vortex Hot N2 Technology : Uniform injection of heated nitrogen gas through multi-hole nozzles ensures consistent flow field and temperature distribution.
- High-Efficiency Heating Jacket : Stably maintains pipeline temperature, effectively reducing heat loss and cold spots.
- Strong Piping Integration : Can be integrated into the pump outlet, optimizing heat distribution.
- Meets SEMI S2 Safety Standards : Complies with environmental and safety regulations for semiconductor equipment.
- Prevents crystal deposition, extending cleaning and maintenance cycles.
- Improves equipment uptime and overall production efficiency.
- Energy-saving design, with thermal efficiency superior to traditional heating methods.
- Stable temperature and gas flow field ensure consistent process quality.
04.Gas Heating System
VGH® Vortex Gas Heaters
VGH® (Vortex Gas Heaters) is a patented technology (Patent No.: I768928) and SEMI S2 certified (No.: ELC18221.1). It is specifically designed for exhaust gas treatment and vacuum line management in semiconductor and LCD manufacturing processes, primarily aiming to reduce by-product deposition, improve equipment uptime, and enhance process stability.
The system integrates heated nitrogen (Hot N2) with a high-efficiency heating jacket to maintain high-temperature conditions in the pipeline, suppressing crystallization and condensation.
Features
Product Applications and Specifications
Product Applications
- Used for exhaust gas delivery lines between the vacuum pump outlet and the local scrubber.
- Exhaust gas treatment systems in semiconductor and LCD manufacturing processes.
- Suitable for use in equipment requiring reduced by-product deposition and enhanced exhaust gas stability.
Product specifications
| Max. Operating Temperatures |
Voltage | Power Range | Integrated Sensor/ Controller (optional) |
Gas Flow | Certification | Patent |
|---|---|---|---|---|---|---|
| 200°C | 208V ~ 230V | 1000W / 2000W | Type K TC | 10~100LPM | SEMI S2 NFPA 79 UL 508A |
I768928 |
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