- Compact structure with high reliability and cleanliness, corrosion resistance, and minimal particle release from the surface.
- Customizable to meet customer needs, balancing heating performance, durability, and energy efficiency.
- Easy to install and disassemble.
- Can be paired with a PID temperature control solution for precise temperature control.
03.Heating Jackets
Cleanroom Heating Jackets
Low-particle heaters are designed for heating pipelines or components in semiconductor and cleanroom equipment. They are made of fluorinated materials (such as ePTFE fabric, fluoropolymer) or silicone, and their surface does not easily release particles. They have passed cleanliness tests and meet Class 100 cleanroom requirements, making them suitable for cleanroom environments.
Features
Product Applications and Specifications
Product Applications
- Gas supply system pipeline heating (e.g., VMB, Valve Box, Gas Panel).
- CVD/ALD process chamber pipeline or component heating.
- High-purity gas/chemical supply systems.
- Chemical vapor deposition (CVD) & dry etching systems.
- Organic material (OLED) or liquid crystal material delivery pipeline heating.
- Aerospace/medical industry, temperature stability requirements for special gas/liquid delivery systems.
Product specifications
| Max. Operating Temperatures |
Voltage | Max. Watt Densities |
Integrated Sensor/ Controller (optional) |
Material | Pipe Dimensions |
|---|---|---|---|---|---|
| 240°C | 110V ~ 230V | Custom (Configurable upon request) |
Type K TC Pt100 Thermostat PID Controller |
ePTFE Cloth | 1 ~ 4 in |
| 180°C | Silicone Rubber |
1/4 ~ 4 in |
BACK