01.Process/Chamber
Torch Heaters
Torch Heaters are high-efficiency localized heating modules designed specifically for semiconductor manufacturing equipment. They are commonly used in CVD/LPCVD/Oxidation systems for preheating of gas injection zones, reaction zones, or furnace tube ports. Their optimized structural design enhances gas activity, prevents condensation, and improves process stability.
Product Applications and Specifications
Product Application
- Semiconductor furnace tube equipment : TELINDY™ Series。
| Max. Operating Temperatures |
Voltage | Max. Watt Densities |
Integrated Sensor/ Controller (optional) |
|---|---|---|---|
| 900°C | 208V ~ 230V | Custom (Configurable upon request) |
Type K TC |
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