- Each heater section can be equipped with a PID controller，To achieve precise temperature control, each heater section has its own independent power supply. Its function is unaffected by temperature fluctuations or malfunctions of other heaters.
- Each heater section is equipped with a temperature switch and a temperature fuse，and Improved circuit design including safe power density, etc.
03.Heating Jackets
Gas Line Heaters
Specialty gas heaters are the perfect solution for semiconductor gas pipeline applications that require precise temperatures to prevent the condensation of critical process chemicals. As a superior alternative to silicone heating tapes, their prefabricated structure allows them to wrap around the delivery line, enabling consistent heater/gas line contact and improved temperature uniformity.
Features
Product Applications and Specifications
Product Application
- Gas Cylinder → VMB → Tool Gas Panel Piping heating.
- Piping heating between Vaporizer and Process Chamber.
- （VMB）、Pipe heating in Gas Cabinet.
| Max. Operating Temperatures |
Voltage | Max. Watt Densities |
Integrated Sensor/ Controller (optional) |
Material | Pipe Dimensions |
|---|---|---|---|---|---|
| 180°C | 110V ~ 230V | Custom (Configurable upon request) |
Type K TC Pt100 Thermostat PID Controller |
Silicone Rubber |
1/4 ~ 1 in |
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