01.Process/Chamber
Silica Fire Retardant Fabric Heater
Primarily used in temperature control modules of Formula series machines. The external insulation material is made of silicon dioxide cloth, which is designed to achieve good heat coverage and ease of installation, and is widely used in semiconductor process gas pipelines and cavity heating systems.
Product Applications and Specifications
Product Application
- Formula series process equipment.
| Max. Operating Temperatures |
Voltage | Max. Watt Densities |
Integrated Sensor/ Controller (optional) |
|---|---|---|---|
| 250°C | 208V ~ 230V | Custom (Configurable upon request) |
Type K TC |
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