- Used for process heating without metal contamination.
- The heating element does not come into contact with the process gas, thus maintaining cleanliness.
- Using carbon fiber as the heating element can improve the thermal response rate and cleanliness.
- There are no concerns about deformation at high temperatures (1000 degrees Celsius).
01.Process/Chamber
Quartz Heaters
Quartz Heaters are heating modules specifically designed for high-cleanliness, high-temperature applications. The core material is high-purity quartz, combined with an embedded heating element, enabling precise and uniform heat control. The product is suitable for vacuum, corrosive gas, or ultra-clean environments, and can be customized in various sizes and structures (such as ring, flat, and spiral types) to meet specific needs.
Features
Product Applications and Specifications
Product Application
- Semiconductor equipment : TEL/Formula THERMOPLUG。
- It can be used in chemical tanks such as phosphoric acid tanks up to 250 degrees Celsius.
- The heating element can be combined with the quartz cylinder to replace the submersible heater.
- This device can be used as an auxiliary heater, placed at the bottom of a vertical furnace tube, to increase the uniform temperature zone of the furnace tube and improve batch production.
Material Specifications
| Type | Material | Electrode | Heating Wire |
|---|---|---|---|
| Plate | GE-124 | Tungsten Rod | Graphite Fiber |
| Tube | GE-214 |
Product Specifications
| Type | Max. Operating Temperatures |
Voltage | Power Range | Plate O.D. | Patent |
|---|---|---|---|---|---|
| Plate | 1000°C | 208V ~ 230V | 4000W | 325mm | M482836 M520719 ZL201130341398.2 ZL201120372386.0 |
| Tube | 100W ~ 2000W | – | – |
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