- With a slim design, approximately 1.5~2.5mm thick, it is suitable for small spaces.
- High response speed; operating temperature can be reached within seconds.
- It has excellent temperature uniformity.
- Custom shapes are available (round, rectangular, with openings, chamfered corners, etc.).
01.Process/Chamber
Mica Heaters
Mica sheet heaters are thin-film resistance heating elements composed of highly insulating natural or synthetic mica and a stainless steel thermally conductive layer. They feature high temperature resistance, uniform heat conduction, and a lightweight structure. The internal heating wires are made of nickel-chromium alloy (NiCr), with mica sheets serving as the insulating layer. This allows them to quickly reach the required operating temperature and maintain stable heat output, making them widely used in precision industrial equipment.
Features
Product Applications and Specifications
Product Application
- Heater for semiconductor PECVD, HDPCVD, ALD, and other equipment.
- Heating elements on plastic packaging, hot press, and laminating machine tables.
- Sample heating for analytical instruments (such as FTIR, spectrometer stages).
- Used for preheating platforms or glass plates in the optoelectronic industry to prevent moisture or contamination.
| Max. Operating Temperatures |
Voltage | Max. Watt Densities |
Integrated Sensor/ Controller (optional) |
Material |
|---|---|---|---|---|
| 400°C | 110V ~ 230V | Custom (Configurable upon request) |
Type K TC | MICA |
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