- High-precision temperature control (<0.5°C).
- Japanese-made TEC controller.
- Dual NTC sensors : separate for temperature control and monitoring.
- Supports preset and PID modes.
- Modbus RTU supports PLC/PC communication.
- LCD color display and LED liquid level indicator.
- Safety interlock control and self-diagnostic function.
Customized Product Development
Bubbler TEC System
The Bubbler system is designed to cool and stably control the temperature of process chemicals in quartz bottles, such as DCE and POCl3.
This product is a customized development project, incorporating a system-integrated TEC (thermoelectric cooling) module, a PID controller, multiple safety and communication functions, and a high-precision temperature management design, all part of ZHI HUI CO., LTD diverse heating application solutions for customers.
Features
Product Applications and Specifications
Product Applications
- Used for exhaust gas delivery lines between the vacuum pump outlet and the local scrubber.
- Exhaust gas treatment systems in semiconductor and LCD manufacturing processes.
- Suitable for use in equipment requiring reduced by-product deposition and enhanced exhaust gas stability.
Product specifications
| Temperature Range | Voltage | Integrated Sensor/ Controller (optional) |
Quartz bottle |
|---|---|---|---|
| 15°C~30°C | 100V ~ 240V AC (Built-in EMI filter) |
NTC x2 sets Thermo-module x3 sets TEC module Controller PID Controller |
1.5L |
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