04.Gas Heating System
CDA Heaters
The CDA heater is designed to heat clean, dry air (CDA) to a specified temperature and deliver it into the interior or cavity of the process equipment for dehumidification, anti-condensation, and improved temperature stability.
Product Applications and Specifications
Product Application
- Used in Lam etching equipment, it can be used for original factory refurbishment or customized improvements.
- Applicable models : Kiyo-EX, Kiyo-CX, Kiyo-FX, Kiyo-GX, SOLO.
Product specifications
| Max. Operating Temperatures | Voltage | Power Range | ntegrated Sensor/Controller (optional) |
|---|---|---|---|
| 120°C | 208V ~230V | 1100W Custom |
N/A |
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