- It offers good mechanical strength and corrosion resistance, making it suitable for cleanrooms and corrosive environments.
- The heating surface is in close contact with the object to be heated, which improves heating efficiency and temperature uniformity.
- Customization is available based on pipe diameter and temperature control requirements.
- Multiple wiring designs, junction boxes or high-temperature resistant wires, to fit the space of semiconductor equipment.
01.Process/Chamber
Band Heaters
A band heater is a resistance heater designed to encase cylindrical objects. It consists of a metal casing and internal heating elements, providing a highly efficient and stable heat source. Its compact structure and high thermal conductivity make it commonly used in semiconductor manufacturing equipment to heat components such as pipes, valves, and heating bottles, ensuring stable temperatures of gases or liquids to maintain process accuracy and efficiency.
Features
Product Applications and Specifications
Product Application
- Etch process, application examples : Lam Kiyo family series.
- Plastic injection molding machine barrel heating.
Product Specifications
| Max. Operating Temperatures |
Voltage | Max. Watt Densities |
Integrated Sensor/ Controller (optional) |
Material |
|---|---|---|---|---|
| 60°C | 208V ~ 230V | Custom (Configurable upon request) |
Pt100 | Aluminum |
| 200°C | SUS 304 |
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